US 12,072,291 B2
Apparatus and method for element analysis of materials by means of optical emission spectroscopy
Volker Sturm, Aachen (DE)
Assigned to Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE)
Appl. No. 17/292,985
Filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V., Munich (DE)
PCT Filed Nov. 14, 2019, PCT No. PCT/EP2019/081335
§ 371(c)(1), (2) Date May 11, 2021,
PCT Pub. No. WO2020/099569, PCT Pub. Date May 22, 2020.
Claims priority of application No. 10 2018 128 754.2 (DE), filed on Nov. 15, 2018.
Prior Publication US 2021/0396679 A1, Dec. 23, 2021
Int. Cl. G01N 21/71 (2006.01); G01J 3/443 (2006.01); G01N 21/15 (2006.01); G01N 21/33 (2006.01)
CPC G01N 21/718 (2013.01) [G01J 3/443 (2013.01); G01N 21/15 (2013.01); G01N 21/33 (2013.01); G01N 2021/151 (2013.01); G01N 2021/335 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An apparatus for element analysis of materials by means of laser-induced plasma spectroscopy, comprising:
a means for exciting a plasma from a partial quantity of a test sample made of a material to be analyzed;
a means for detection and spectral evaluation of optical radiation emitted from the plasma; and
a beam guidance means for guiding at least a portion of the optical radiation emitted from the plasma to the means for detection and spectral evaluation; and
a means for flushing at least a portion of the apparatus with an inert gas;
wherein the beam guidance means comprises at least one capillary tube, which also serves to guide the inert gas, and is arranged such that optical radiation emitted from the plasma is detected at a flat angle of 1° to 20°.