| CPC G01L 1/148 (2013.01) | 22 Claims |
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1. A sensor device comprising:
a plate;
a first cavity; and
a second cavity separated from the first cavity by a diaphragm,
wherein the plate forms a first electrode of a capacitance,
wherein the diaphragm forms a second electrode of the capacitance and is configured to deflect in response to an applied pressure, and
wherein the second electrode forms an auxiliary capacitance with a third electrode formed along a planar surface of a substrate of the sensor device and coupled to one or more cavity walls formed between the diaphragm and the substrate.
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