US 12,072,181 B2
Inspection apparatus and method
Yan Wang, San Jose, CA (US); Jian Zhang, San Jose, CA (US); Zhiwen Kang, San Jose, CA (US); and Yixiang Wang, Fremont, CA (US)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Sep. 28, 2021, as Appl. No. 17/487,896.
Claims priority of provisional application 63/086,293, filed on Oct. 1, 2020.
Prior Publication US 2022/0107176 A1, Apr. 7, 2022
Int. Cl. G01B 15/08 (2006.01); H01J 37/20 (2006.01); H01J 37/21 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC G01B 15/08 (2013.01) [H01J 37/20 (2013.01); H01J 37/21 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/2814 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An inspection apparatus comprising:
a beam splitter configured to split a radiation beam into multiple beamlets that each reflect off a substrate; and
multiple radiation reflecting components, wherein each radiation reflecting component is associated with one of the beamlets and is configured to support a different target height for the substrate by enabling detection of a height or a levelness of the substrate based on the associated beamlet reflecting off the substrate,
wherein the beam splitter is configured to provide one of the beamlets at a different incidence angle on the substrate than another one of the beamlets and/or the multiple radiation reflecting components are arranged to provide the beamlets on the substrate and such that one of the radiation reflecting components is oriented at a different angle than another one of the radiation reflecting components.