CPC G01B 15/08 (2013.01) [H01J 37/20 (2013.01); H01J 37/21 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/2814 (2013.01)] | 20 Claims |
1. An inspection apparatus comprising:
a beam splitter configured to split a radiation beam into multiple beamlets that each reflect off a substrate; and
multiple radiation reflecting components, wherein each radiation reflecting component is associated with one of the beamlets and is configured to support a different target height for the substrate by enabling detection of a height or a levelness of the substrate based on the associated beamlet reflecting off the substrate,
wherein the beam splitter is configured to provide one of the beamlets at a different incidence angle on the substrate than another one of the beamlets and/or the multiple radiation reflecting components are arranged to provide the beamlets on the substrate and such that one of the radiation reflecting components is oriented at a different angle than another one of the radiation reflecting components.
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