US 12,071,689 B2
Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes
Ramesh Chandrasekharan, Lake Oswego, OR (US); Michael Philip Roberts, Tigard, OR (US); Pulkit Agarwal, Beaverton, OR (US); Adrien Lavoie, Newberg, OR (US); Ravi Kumar, Beaverton, OR (US); Nuoya Yang, Portland, OR (US); Chan Myae Myae Soe, Santa Clara, CA (US); and Ashish Saurabh, Portland, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/429,882
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Feb. 12, 2020, PCT No. PCT/US2020/017922
§ 371(c)(1), (2) Date Aug. 10, 2021,
PCT Pub. No. WO2020/167944, PCT Pub. Date Aug. 20, 2020.
Claims priority of provisional application 62/870,150, filed on Jul. 3, 2019.
Claims priority of provisional application 62/806,000, filed on Feb. 15, 2019.
Prior Publication US 2022/0205105 A1, Jun. 30, 2022
Int. Cl. C23C 16/52 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); G05B 19/401 (2006.01)
CPC C23C 16/52 (2013.01) [C23C 16/45544 (2013.01); C23C 16/46 (2013.01); G05B 19/401 (2013.01); G05B 2219/45031 (2013.01); G05B 2219/50333 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a substrate support configured to support a first substrate and comprising a plurality of temperature control elements;
a memory configured to store, for the plurality of temperature control elements, temperature calibration values and sensitivity calibration values;
a calibration module configured to, during calibration of the plurality of temperature control elements, perform
a first calibration process to determine the temperature calibration values, the first calibration process comprising i) calculating a system response of one of the plurality of temperature control elements based on a difference between measured temperatures of the one of the plurality of temperature control elements for different power levels, ii) inverting the system response, and iii) determining the temperature calibration values of the plurality of temperature control elements based on the inverted system response, and
a second calibration process to determine the sensitivity calibration values, wherein the sensitivity calibration values relate at least one of trim amounts to temperature changes or deposition amounts to temperature changes;
an operating parameter module configured to determine a plurality of operating parameters for the plurality of temperature control elements based on the temperature calibration values and the sensitivity calibration values; and
a solving module configured, subsequent to the calibration of the plurality of temperature control elements, to control operation of the plurality of temperature control elements during at least one of a trim step or a deposition step based on the plurality of operating parameters.