CPC C23C 16/4417 (2013.01) [B01F 27/051 (2022.01); B01F 27/0726 (2022.01); B01F 27/074 (2022.01); B01F 27/112 (2022.01); B01F 27/70 (2022.01); B01J 19/0066 (2013.01); B01J 19/18 (2013.01); C23C 16/45555 (2013.01)] | 18 Claims |
1. A method of coating particles, comprising:
dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the vacuum chamber that forms a half-cylinder;
evacuating the vacuum chamber through a vacuum port in an upper portion of the vacuum chamber;
rotating a paddle assembly such that a plurality of paddles orbit a horizontal drive shaft to stir the particles in the particle bed; and
alternating between injecting a first precursor or reactant gas and injecting a second inert gas through channels in a chamber wall of the lower portion of the vacuum chamber into to the lower portion of the vacuum chamber.
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10. A reactor for coating particles, comprising:
a stationary vacuum chamber to hold particles to be coated in a particle bed;
a paddle assembly including a rotatable drive shaft and one or more paddles in the vacuum chamber, the one or more paddles connected to the drive shaft such that rotation of the drive shaft by a motor stirs the particles in the particle bed;
a gas injection assembly to a deliver a first precursor or reactant gas and a second inert gas into a lower portion of the vacuum chamber;
at least one flow regulator to control a first flow rate of the first precursor or reactant gas and a second flow rate of the second inert gas into the lower portion of the vacuum chamber; and
a controller configured to cause the gas injection assembly to alternate between injecting the first precursor or reactant gas and injecting the second inert gas into to the lower portion of the vacuum chamber.
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