US 12,071,683 B2
Clamping device
Haitao Chen, Kunshan (CN); Qiangqiang Li, Kunshan (CN); Bin Xue, Kunshan (CN); Xiaogang Xin, Kunshan (CN); Fei Sun, Kunshan (CN); and Zaifeng Qiu, Kunshan (CN)
Assigned to KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD., Kushan Jiangsu (CN)
Filed by Kunshan Go-Visionox Opto-Electronics Co., Ltd., Kunshan (CN)
Filed on Nov. 30, 2021, as Appl. No. 17/537,716.
Application 17/537,716 is a continuation of application No. PCT/CN2020/118996, filed on Sep. 29, 2020.
Claims priority of application No. 201922386790.2 (CN), filed on Dec. 26, 2019.
Prior Publication US 2022/0090257 A1, Mar. 24, 2022
Int. Cl. H01L 21/683 (2006.01); C23C 14/50 (2006.01)
CPC C23C 14/50 (2013.01) [H01L 21/683 (2013.01); Y10T 29/5397 (2015.01)] 19 Claims
OG exemplary drawing
 
1. A clamping device, configured to clamp a substrate, comprising:
a clamping plate; and
a flattening mechanism comprising at least one adjusting member, the at least one adjusting member being disposed on the clamping plate and being configured to exert a force to the clamping plate to flatten the clamping plate;
wherein the adjusting member comprises:
a connecting portion connected to the clamping plate; and
at least one adjusting portion connected to the connecting portion, the at least one adjusting portion passing through the connecting portion and configured to exert the force to the clamping plate.