US 12,071,342 B2
Methods and devices for microelectromechanical resonators
Vamsy Chodavarapu, Brossard (CA); and George Xereas, Montreal (CA)
Assigned to Stathera IP Holding, Inc., Montreal (CA)
Filed by Stathera IP Holdings Inc., Montreal (CA)
Filed on Oct. 24, 2022, as Appl. No. 17/971,781.
Application 17/971,781 is a continuation of application No. 16/369,757, filed on Mar. 29, 2019, granted, now 11,479,460.
Application 16/369,757 is a continuation of application No. 14/790,220, filed on Jul. 2, 2015, granted, now 10,291,200, issued on May 14, 2019.
Claims priority of provisional application 62/020,049, filed on Jul. 2, 2014.
Prior Publication US 2023/0051438 A1, Feb. 16, 2023
Int. Cl. B81C 1/00 (2006.01); B81B 7/00 (2006.01); G01L 9/00 (2006.01); G01L 9/12 (2006.01); H03H 3/007 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/24 (2006.01)
CPC B81C 1/00182 (2013.01) [B81B 7/007 (2013.01); B81C 1/00269 (2013.01); B81C 1/00301 (2013.01); G01L 9/0042 (2013.01); G01L 9/0073 (2013.01); G01L 9/12 (2013.01); H03H 3/0072 (2013.01); H03H 3/0073 (2013.01); H03H 9/0561 (2013.01); H03H 9/1057 (2013.01); H03H 9/2405 (2013.01); H03H 9/2426 (2013.01); H03H 9/2431 (2013.01); H03H 9/2436 (2013.01); B81B 2203/0307 (2013.01); H03H 2009/2442 (2013.01); H03H 9/2452 (2013.01); H03H 9/2463 (2013.01); H03H 9/2473 (2013.01); H03H 9/2478 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A MEMS device comprising:
a MEMS resonating element;
a movable electrode for electrostatic actuation and sensing of the MEMS resonating element, wherein the movable electrode comprises an opening in the movable electrode;
a stop anchor located within the opening in the movable electrode; and
a welding pad located on (i) a surface of the movable electrode in the opening of the movable electrode or (ii) a surface of the stop anchor in the opening of the movable electrode, wherein the movable electrode is configured to move in a particular direction in response to a voltage applied between the movable electrode and the MEMS resonating element such that, when the movable electrode is moved in the particular direction, the welding pad contacts both the movable electrode and the stop anchor, thereby causing the surface of the movable electrode to be separated from the surface of the stop anchor by a thickness of the welding pad.