US 12,070,875 B2
Silicon carbide wafers with relaxed positive bow and related methods
Simon Bubel, Carrboro, NC (US); Matthew Donofrio, Raleigh, NC (US); John Edmond, Durham, NC (US); and Ian Currier, Wake Forest, NC (US)
Assigned to WOLFSPEED, INC., Durham, NC (US)
Filed by Wolfspeed, Inc., Durham, NC (US)
Filed on Apr. 7, 2023, as Appl. No. 18/297,144.
Application 18/297,144 is a continuation of application No. 17/178,532, filed on Feb. 18, 2021, granted, now 11,654,596.
Application 17/178,532 is a continuation of application No. 16/784,311, filed on Feb. 7, 2020, granted, now 11,034,056, issued on Jun. 15, 2021.
Application 16/784,311 is a continuation of application No. 16/415,721, filed on May 17, 2019, granted, now 10,611,052, issued on Apr. 7, 2020.
Prior Publication US 2023/0241803 A1, Aug. 3, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B28D 5/00 (2006.01); H01L 29/16 (2006.01)
CPC B28D 5/0011 (2013.01) [H01L 29/1608 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A silicon carbide (SiC) wafer comprising:
a silicon face and a carbon face;
a radial doping profile that is variable from a perimeter of the SiC wafer to a center of the SiC wafer; and
a relaxed positive bow from the silicon face.