US 12,070,848 B2
Robot detection and control system within chamber and substrate processing apparatus including the same
Da Sol Kim, Seoul (KR); Hyeonin Kang, Cheonan-si (KR); and Han Wook Jung, Hwaseong-si (KR)
Assigned to SEMES Co. Ltd., Cheonan-si (KR)
Filed by SEMES Co. Ltd., Cheonan-si (KR)
Filed on Jun. 25, 2020, as Appl. No. 16/911,737.
Claims priority of application No. 10-2019-0077370 (KR), filed on Jun. 27, 2019.
Prior Publication US 2020/0406473 A1, Dec. 31, 2020
Int. Cl. B25J 13/08 (2006.01); G01S 13/02 (2006.01); H01L 21/677 (2006.01)
CPC B25J 13/089 (2013.01) [B25J 13/086 (2013.01); G01S 13/0209 (2013.01); H01L 21/67742 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A robot detection and control system within a chamber comprising:
a UWB radar provided in the chamber;
a position detection unit configured to detect a position of a robot moving in the chamber using data by the UWB radar; and
a robot control unit configured to compare the position of the robot with a position of an obstacle to control the movement of the robot.