CPC A61N 5/1077 (2013.01) [A61N 5/1048 (2013.01); H05H 5/03 (2013.01); H05H 5/063 (2013.01); A61N 2005/109 (2013.01); A61N 2005/1095 (2013.01)] | 20 Claims |
1. A beam system, comprising:
a particle source configured to emit a charged particle beam;
a pre-accelerator system configured to accelerate the charged particle beam from the particle source;
an accelerator configured to accelerate the charged particle beam from the pre-accelerator system;
a first vacuum pump chamber positioned between the pre-accelerator system and the accelerator, wherein the first vacuum pump chamber is configured to remove gas exiting the accelerator into the pre-accelerator system; and
a second vacuum pump chamber positioned between the particle source and the pre-accelerator system.
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