CPC H01J 37/32128 (2013.01) [H01J 37/32146 (2013.01); H01J 37/32165 (2013.01); H01J 37/32174 (2013.01); H01J 37/32532 (2013.01); H01L 21/3065 (2013.01)] | 54 Claims |
1. A radio frequency (RF) generator comprising:
a RF power supply; and
a controller coupled to the RF power supply, the controller configured to
control the RF power supply to vary a first RF output to a load,
control at least one of the first RF output or an operation of a motor in a first predetermined manner that operates to match a variance in impedance of the load over a first cycle portion of a second RF output that is applied to the load from another power supply, wherein
the first cycle portion of the second RF output being less than a full cycle of the second RF output, and
the first predetermined manner includes control of at least one of a power of the first RF output, a frequency of the first RF output, or the motor associated with the first RF output to increase power delivered to the load during the first cycle portion.
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