US 11,742,182 B2
Control method and plasma processing apparatus
Chishio Koshimizu, Miyagi (JP); Taichi Hirano, Miyagi (JP); Toru Hayasaka, Miyagi (JP); Shinji Kubota, Miyagi (JP); Koji Maruyama, Miyagi (JP); and Takashi Dokan, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Mar. 22, 2022, as Appl. No. 17/700,496.
Application 17/700,496 is a continuation of application No. 17/359,642, filed on Jun. 28, 2021.
Application 17/359,642 is a continuation of application No. 17/017,039, filed on Sep. 10, 2020, granted, now 11,476,089.
Application 17/017,039 is a continuation in part of application No. PCT/JP2019/023238, filed on Jun. 12, 2019.
Claims priority of application No. 2018-119344 (JP), filed on Jun. 22, 2018; and application No. 2019-105708 (JP), filed on Jun. 5, 2019.
Prior Publication US 2022/0216036 A1, Jul. 7, 2022
Int. Cl. H01J 37/32 (2006.01); H01L 21/3065 (2006.01)
CPC H01J 37/32128 (2013.01) [H01J 37/32146 (2013.01); H01J 37/32165 (2013.01); H01J 37/32174 (2013.01); H01J 37/32532 (2013.01); H01L 21/3065 (2013.01)] 54 Claims
OG exemplary drawing
 
1. A radio frequency (RF) generator comprising:
a RF power supply; and
a controller coupled to the RF power supply, the controller configured to
control the RF power supply to vary a first RF output to a load,
control at least one of the first RF output or an operation of a motor in a first predetermined manner that operates to match a variance in impedance of the load over a first cycle portion of a second RF output that is applied to the load from another power supply, wherein
the first cycle portion of the second RF output being less than a full cycle of the second RF output, and
the first predetermined manner includes control of at least one of a power of the first RF output, a frequency of the first RF output, or the motor associated with the first RF output to increase power delivered to the load during the first cycle portion.