CPC H01J 37/32128 (2013.01) [H01J 37/32146 (2013.01); H01J 37/32165 (2013.01); H01J 37/32174 (2013.01); H01J 37/32532 (2013.01); H01L 21/3065 (2013.01)] | 33 Claims |
13. A controller in a plasma processing apparatus comprising:
circuitry configured to
control a low frequency (LF) radio frequency (RF) power supply to generate LF power at a first radio frequency (RF) frequency, a waveform of the first RF frequency having a cycle, a first half-cycle of the waveform being separated from a second half cycle of the waveform at a zero-crossing;
control a high frequency (HF) RF power supply to generate HF power at a changeable RF frequency that is higher in frequency than the first RF frequency, the LF power and the HF power being applied to an electrode in the plasma processing apparatus; and
control the HF RF power supply to provide the HF power at a first HF frequency during the first half-cycle of the waveform of first RF frequency, and provide the HF power at a second HF frequency during the second half-cycle of the waveform of the first RF frequency.
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33. A non-transitory computer readable storage device having stored therein computer readable instructions that when executed by controller circuitry cause the controller circuitry to perform a control process in a plasma processing apparatus comprising:
generating, with a low frequency (LF) radio frequency (RF) power supply, LF power at a first radio frequency (RF) frequency, a waveform of the first RF frequency having a cycle, a first half-cycle of the waveform being separated from a second half cycle of the waveform at a zero-crossing;
generating, with a high frequency (HF) RF power supply, HF power at a changeable RF frequency that is higher in frequency than the first RF frequency, the LF power and the HF power being applied to an electrode in the plasma processing apparatus; and
controlling the HF RF power supply to provide the HF power at a first HF frequency during the first half-cycle of the waveform of first RF frequency, and provide the HF power at a second HF frequency during the second half-cycle of the waveform of the first RF frequency.
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