US 11,742,151 B2
Aerosol assisted chemical vapor deposition methods useful for making dye-sensitized solar cells with platinum dialkyldithiocarbamate complexes
Muhammad Ali Ehsan, Dhahran (SA); Abdul Rehman, Dhahran (SA); and Abbas Saeed Hakeem, Dhahran (SA)
Assigned to King Fahd University of Petroleum and Minerals, Dhahran (SA)
Filed by King Fahd University of Petroleum and Minerals, Dhahran (SA)
Filed on May 29, 2019, as Appl. No. 16/425,621.
Prior Publication US 2020/0381186 A1, Dec. 3, 2020
Int. Cl. C23C 16/06 (2006.01); H01G 9/20 (2006.01); H01G 9/00 (2006.01); C23C 16/448 (2006.01); C03C 17/09 (2006.01)
CPC H01G 9/2022 (2013.01) [C03C 17/09 (2013.01); C23C 16/06 (2013.01); C23C 16/4486 (2013.01); H01G 9/0029 (2013.01); H01G 9/2036 (2013.01); H01G 9/2059 (2013.01); C03C 2217/254 (2013.01); C03C 2218/152 (2013.01)] 20 Claims
 
1. An aerosol assisted chemical vapor deposition method for depositing a platinum layer onto a substrate, the method comprising:
heating the substrate to a deposition temperature above 150° C. in a reactor; and
introducing into the reactor, at the deposition temperature, an aerosol comprising a platinum dithiocarbamate compound, salt, and/or solvate thereof, at a deposition temperature in a range of 350 to 600° C., to thereby deposit the platinum layer on the substrate,
wherein the platinum dithiocarbamate compound is of formula (Ib):

OG Complex Work Unit Chemistry
wherein R1 and R2 are independently hydrogen or C1 to C3 alkyl, and
wherein R3 to R7 are independently hydrogen, C0-3-alkyl-halide, C1-5-alkyl, C0-3alkyl-alcohol, C0-3-alkyl-thiol, C0-3-alkyl-amine, C0-3-alkyl-carboxylate, C0-3-alkyl-nitrile, C0-3-alkyl-thiocyanate, C0-3-alkyl-isocyanate, C0-3-alkyl-cyanate, C0-3-alkyl-O—C1-5alkyl, C0-3alkyl-CO2—C1-5-alkyl, C0-3-alkyl-O2C—C1-5alkyl, C0-3-alkyl-N—(C1-5-alkyl)2, C0-3-alkyl-C(O)N—(C1-5-alkyl)2, C0-3-alkyl-C(O)—C1-5-alkyl, or C0-3-alkyl-S—C1-5-alkyl
wherein the platinum layer formed has a thickness in a range of at least 350 nm after 30 minutes of deposition time, and
wherein the platinum layer comprises at least 90 wt. % of elemental Pt, based on total deposition layer weight.