US 11,740,643 B2
Temperature control device and method, and inspection apparatus
Masahito Kobayashi, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Feb. 10, 2021, as Appl. No. 17/172,655.
Claims priority of application No. 2020-021128 (JP), filed on Feb. 12, 2020.
Prior Publication US 2021/0247786 A1, Aug. 12, 2021
Int. Cl. G05D 23/27 (2006.01); G05D 23/19 (2006.01); H01L 21/67 (2006.01)
CPC G05D 23/27 (2013.01) [G05D 23/1919 (2013.01); H01L 21/67248 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A temperature control device for controlling a temperature of a temperature control object, the temperature control device comprising:
a heater having a heating source configured to heat the temperature control object;
a cooler having a cooling source configured to cool the temperature control object;
an infrared sensor configured to measure the temperature of the temperature control object; and
a temperature controller configured to allow a control system including a sliding mode control to control the heater and the cooler based on a measurement signal from the infrared sensor and perform a feedback control of the temperature of the temperature control object,
wherein the temperature controller includes:
a sliding mode controller configured to use a power supplied to the heating source as an operation amount;
a cooling mode controller configured to use a power supplied to the cooling source as an operation amount; and
a switching controller configured to determine whether to output an output of the sliding mode controller alone as a first operation amount to the heating source or to use an output of the cooling mode controller as a second operation amount without using the output of the sliding mode controller, based on a value of a nonlinear term between a linear term and the nonlinear term that are the output of the sliding mode controller.