CPC G05D 23/27 (2013.01) [G05D 23/1919 (2013.01); H01L 21/67248 (2013.01)] | 16 Claims |
1. A temperature control device for controlling a temperature of a temperature control object, the temperature control device comprising:
a heater having a heating source configured to heat the temperature control object;
a cooler having a cooling source configured to cool the temperature control object;
an infrared sensor configured to measure the temperature of the temperature control object; and
a temperature controller configured to allow a control system including a sliding mode control to control the heater and the cooler based on a measurement signal from the infrared sensor and perform a feedback control of the temperature of the temperature control object,
wherein the temperature controller includes:
a sliding mode controller configured to use a power supplied to the heating source as an operation amount;
a cooling mode controller configured to use a power supplied to the cooling source as an operation amount; and
a switching controller configured to determine whether to output an output of the sliding mode controller alone as a first operation amount to the heating source or to use an output of the cooling mode controller as a second operation amount without using the output of the sliding mode controller, based on a value of a nonlinear term between a linear term and the nonlinear term that are the output of the sliding mode controller.
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