CPC G03F 7/7095 (2013.01) [G03F 7/707 (2013.01); G03F 7/70783 (2013.01); H01L 21/6875 (2013.01)] | 20 Claims |
18. A method of providing a friction-switch during loading of a substrate onto a substrate holder, the method comprising:
applying a first molecular species comprising at least one low-interaction region of a friction-switch coating to provide the friction-switch to a first portion of the backside surface of the substrate;
applying a second molecular species to a second portion of the backside surface of the substrate; and
loading the substrate onto the substrate holder,
wherein the second molecular species reacts during loading of the substrate to form a high-interaction region of the friction-switch coating.
|