CPC G03F 7/70525 (2013.01) | 20 Claims |
1. A method for determining an inspection strategy for at least one substrate, the method comprising:
quantifying, using a prediction model and based on one or both of pre-processing data associated with the at least one substrate and/or any available post-processing data associated with the at least one substrate, a compliance metric value for a compliance metric relating to a prediction of compliance with a quality requirement; and
deciding on an inspection strategy for the at least one substrate, based on the compliance metric value, an expected cost associated with the inspection strategy and at least one objective value describing an expected value of the inspection strategy in terms of at least one objective relating to the prediction model.
|