US 11,740,557 B2
Chemical liquid, chemical liquid storage body, chemical liquid filling method, and chemical liquid storage method
Tetsuya Kamimura, Haibara-gun (JP); and Satomi Takahashi, Haibara-gun (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on May 10, 2022, as Appl. No. 17/740,438.
Application 17/740,438 is a division of application No. 16/365,016, filed on Mar. 26, 2019, granted, now 11,360,389.
Application 16/365,016 is a continuation of application No. PCT/JP2017/030885, filed on Aug. 29, 2017.
Claims priority of application No. 2016-188273 (JP), filed on Sep. 27, 2016.
Prior Publication US 2022/0276561 A1, Sep. 1, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C11D 3/16 (2006.01); C11D 3/20 (2006.01); C11D 3/43 (2006.01); C11D 7/22 (2006.01); C11D 7/26 (2006.01); C11D 7/50 (2006.01); C08F 10/06 (2006.01); C08F 14/26 (2006.01); B65D 88/06 (2006.01); B65D 88/08 (2006.01); G03F 7/32 (2006.01); G03F 7/16 (2006.01); H01L 21/027 (2006.01)
CPC G03F 7/325 (2013.01) [B65D 88/06 (2013.01); B65D 88/08 (2013.01); C08F 10/06 (2013.01); C08F 14/26 (2013.01); G03F 7/16 (2013.01); H01L 21/0274 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A chemical liquid storage body comprising:
a storage tank; and
a chemical liquid that is stored in the storage tank,
wherein a liquid contact portion contacting the chemical liquid in the storage tank is formed of a nonmetallic material or electropolished stainless steel, and
wherein the chemical liquid comprises:
an organic solvent;
a metal impurity; and
an organic impurity,
the metal impurity contains metal atoms,
the total content of the metal atoms in the chemical liquid with respect to the total mass of the chemical liquid is equal to or smaller than 50 mass ppt,
the total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 1500 mass ppm,
the organic impurity contains an alcohol impurity,
the mass ratio of the content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5, and
the organic solvent contains at least one compound selected from the group consisting of diethyl ether, dipropyl ether, diisopropyl ether, butyl methyl ether, butyl ethyl ether, butyl propyl ether, dibutyl ether, diisobutyl ether, tert-butyl methyl ether, tert-butyl ethyl ether, tert-butyl propyl ether, di-tert-butyl ether, dipentyl ether, diisoamyl ether, cyclopentyl methyl ether, cyclohexyl methyl ether, bromomethyl methyl ether, α,α-dichloromethyl methyl ether, chloromethyl ethyl ether, 2-chloroethyl methyl ether, 2-bromoethyl methyl ether, 2,2-dichloroethyl methyl ether, 2-chloroethyl ethyl ether, 2-bromoethyl ethyl ether, (±)-1,2-dichloroethyl ethyl ether, 2,2,2-trifluoroethyl ether, ethyl vinyl ether, butyl vinyl ether, allyl ethyl ether, allyl propyl ether, allyl butyl ether, diallyl ether, 2-methoxypropene, ethyl-1-propenylether, cis-1-bromo-2-ethoxyethylene, 2-chloroethyl vinyl ether, allyl-1,1,2,2-tetrafluoroethyl ether, octane, isooctane, nonane, decane, methyl cyclohexane, decalin, xylene, ethyl benzene, diethyl benzene, cumene, sec-butyl benzene, cymene, dipentene, methyl pyruvate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, methyl methoxypropionate, cyclohexanone, isoamyl acetate, amyl aceate, n-amyl acetate, chloroform, dichloromethane, 1,4-dioxane, hexyl alcohol, γ-butyrolactone, 2-heptanone, 2-hydroxymethyl butyrate, cyclohexanone dimethyl acetal, 4-methyl-2-pentanol, and tetrahydrofuran.