US 11,740,452 B2
Optical device
Tatsuya Sugimoto, Hamamatsu (JP); Tomofumi Suzuki, Hamamatsu (JP); and Kyosuke Kotani, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 16/625,702
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jul. 6, 2018, PCT No. PCT/JP2018/025640
§ 371(c)(1), (2) Date Dec. 21, 2019,
PCT Pub. No. WO2019/009398, PCT Pub. Date Jan. 10, 2019.
Claims priority of application No. 2017-133093 (JP), filed on Jul. 6, 2017; application No. 2017-235021 (JP), filed on Dec. 7, 2017; application No. 2017-235022 (JP), filed on Dec. 7, 2017; application No. 2017-235025 (JP), filed on Dec. 7, 2017; and application No. 2018-080679 (JP), filed on Apr. 19, 2018.
Prior Publication US 2021/0132368 A1, May 6, 2021
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G01J 3/02 (2006.01); G01J 3/45 (2006.01)
CPC G02B 26/0841 (2013.01) [B81B 3/0045 (2013.01); G01J 3/021 (2013.01); G01J 3/0202 (2013.01); G01J 3/45 (2013.01); B81B 2201/033 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/04 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An optical device comprising:
a base that includes a main surface;
a movable unit that includes an optical function unit; and
an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface,
wherein the elastic support unit includes a lever, a first torsion support portion, and a second torsion support portion, wherein the first torsion support member extends along a second direction perpendicular to the first direction, the first torsion support member is connected between the lever and the movable unit, the second torsion support portion extends along the second direction, and the second torsion support member is connected between the lever and the base, and
a torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.