CPC G02B 6/4248 (2013.01) [G02B 6/30 (2013.01); H01L 23/562 (2013.01); G02B 2006/12119 (2013.01)] | 20 Claims |
1. A photonic integrated circuit (PIC) structure, comprising:
a barrier structure on a substrate, the barrier structure having a first sidewall, and a second sidewall opposite the first sidewall;
a guard ring alongside an interior sidewall of the barrier structure, the guard ring physically separated from the barrier structure by a distance;
a passage within the barrier structure, the passage extending from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure, wherein the passage includes a reversal segment between the first end and the second end, and an orientation of the passage within the reversal segment transitions from a first direction between the first sidewall and the second sidewall to a second direction opposite the first direction; and
a waveguide within the passage and extending from the first end to the second end thereof.
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