US 11,740,418 B2
Barrier structure with passage for waveguide in photonic integrated circuit
Nicholas A. Polomoff, Hopewell Junction, NY (US); John J. Ellis-Monaghan, Grand Isle, VT (US); Frank G. Kuechenmeister, Dresden (DE); Jae Kyu Cho, Niskayuna, NY (US); and Michal Rakowski, Ballston Spa, NY (US)
Assigned to GlobalFoundries U.S. Inc., Santa Clara, CA (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Santa Clara, CA (US)
Filed on Mar. 23, 2021, as Appl. No. 17/209,416.
Prior Publication US 2022/0308297 A1, Sep. 29, 2022
Int. Cl. G02B 6/42 (2006.01); H01L 23/00 (2006.01); G02B 6/30 (2006.01); G02B 6/12 (2006.01)
CPC G02B 6/4248 (2013.01) [G02B 6/30 (2013.01); H01L 23/562 (2013.01); G02B 2006/12119 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A photonic integrated circuit (PIC) structure, comprising:
a barrier structure on a substrate, the barrier structure having a first sidewall, and a second sidewall opposite the first sidewall;
a guard ring alongside an interior sidewall of the barrier structure, the guard ring physically separated from the barrier structure by a distance;
a passage within the barrier structure, the passage extending from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure, wherein the passage includes a reversal segment between the first end and the second end, and an orientation of the passage within the reversal segment transitions from a first direction between the first sidewall and the second sidewall to a second direction opposite the first direction; and
a waveguide within the passage and extending from the first end to the second end thereof.