US 11,740,087 B2
Inertial sensor
Shota Harada, Nisshin (JP); Keitaro Ito, Nisshin (JP); Katsuaki Goto, Nisshin (JP); Yuuki Inagaki, Nisshin (JP); Takahiko Yoshida, Nisshin (JP); Yusuke Kawai, Nisshin (JP); Teruhisa Akashi, Nisshin (JP); and Hirofumi Funabashi, Nisshin (JP)
Assigned to DENSO CORPORATION, Kariya (JP); TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota (JP); and MIRISE Technologies Corporation, Nisshin (JP)
Filed by DENSO CORPORATION, Kariya (JP); TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota (JP); and MIRISE Technologies Corporation, Nisshin (JP)
Filed on Mar. 24, 2022, as Appl. No. 17/703,164.
Claims priority of application No. 2021-057614 (JP), filed on Mar. 30, 2021.
Prior Publication US 2022/0316880 A1, Oct. 6, 2022
Int. Cl. G01C 19/56 (2012.01); G01S 19/47 (2010.01)
CPC G01C 19/56 (2013.01) [G01S 19/47 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An inertial sensor comprising:
a micro vibration body that is a walled member having a front surface, which is a surface on a side having an outer diameter, and a back surface, which is an opposite surface to the front surface, the micro vibration body including a curved surface portion, which has an annular curved surface, a recessed portion, which is recessed from the curved surface portion to a center of the micro vibration body, a bottom surface protruding portion, which protrudes from a bottom surface of the recessed portion on a side of the back surface, a through hole, which is in the bottom surface protruding portion and communicates the front surface with the back surface, and a conductive layer, which covers at least a part of the front surface;
a mounting substrate that includes a lower substrate and an upper substrate, which are joined to each other, the lower substrate having a positioning recess into which the bottom surface protruding portion of the micro vibration body is inserted, the upper substrate including an inner frame portion, which surrounds a periphery of the positioning recess, and a plurality of electrode portions, which are separated from each other and surround the inner frame portion; and
a joining member that is provided in the positioning recess and joins the bottom surface protruding portion of the micro vibration body with the mounting substrate, wherein
the curved surface portion of the micro vibration body is hollow,
the bottom surface is in contact with a region of the mounting substrate around the positioning recess,
a tip end of the bottom surface protruding portion has a tip end surface distal to the bottom surface,
the positioning recess is spaced apart from the tip end surface, and
the joining member at least partially enters the through hole and is electrically connected to the conductive layer.