CPC C23C 16/45544 (2013.01) [C23C 16/4412 (2013.01); C23C 16/4417 (2013.01); C23C 16/442 (2013.01)] | 10 Claims |
1. An atomic layer deposition apparatus for coating particles, comprising:
a vacuum chamber, comprising a reaction space for accommodating a plurality of particles, wherein the reaction space comprises a polygonal columnar shape;
a shaft sealing device, comprising an outer tube and an inner tube, wherein the outer tube comprises an accommodating space for accommodating the inner tube;
a driving unit, connected to the vacuum chamber via the outer tube of the shaft sealing device, wherein when the driving unit drives the vacuum chamber to rotate through the outer tube of the shaft sealing device, the inner tube does not rotate along therewith;
at least one air extraction line, located within the inner tube and fluidly connected to the reaction space of the vacuum chamber, for extracting a gas from the reaction space; and
at least one air intake line, located within the inner tube and fluidly connected to the reaction space of the vacuum chamber, for transporting a precursor or a non-reactive gas to the reaction space, wherein the non-reactive gas blows the particles around in the reaction space.
|