CPC C09D 1/00 (2013.01) [B05D 1/005 (2013.01); B05D 3/0254 (2013.01); C01B 21/068 (2013.01); C01B 21/087 (2013.01); C01B 33/126 (2013.01); C09D 7/63 (2018.01); C23C 18/1204 (2013.01); C23C 18/1208 (2013.01); C23C 18/1279 (2013.01)] | 17 Claims |
1. A Si-containing film forming composition comprising
a) a catalyst and/or a polysilane, and
b) a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3.
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