US 11,739,220 B2
Perhydropolysilazane compositions and methods for forming oxide films using same
Antonio Sanchez, Tsukuba (JP); Gennadiy Itov, Flemington, NJ (US); Manish Khandelwal, Somerset, NJ (US); Cole Ritter, Easton, PA (US); Peng Zhang, Branchburg, NJ (US); Jean-Marc Girard, Versailles (FR); Zhiwen Wan, Plano, TX (US); Glenn Kuchenbeiser, Fremont, CA (US); David Orban, Hampton, NJ (US); Sean Kerrigan, Princeton, NJ (US); Reno Pesaresi, Easton, PA (US); Matthew Damien Stephens, Morristown, NJ (US); Yang Wang, Garnet Valley, PA (US); Guillaume Husson, Newark, DE (US); and Grigory Nikiforov, Bridgewater, NJ (US)
Assigned to L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR); and American Air Liquide, Inc., Fremont, CA (US)
Appl. No. 16/971,869
Filed by L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR); and American Air Liquide, Inc., Fremont, CA (US)
PCT Filed Feb. 21, 2019, PCT No. PCT/US2019/018985
§ 371(c)(1), (2) Date Aug. 21, 2020,
PCT Pub. No. WO2019/165093, PCT Pub. Date Aug. 29, 2019.
Claims priority of provisional application 62/633,193, filed on Feb. 21, 2018.
Prior Publication US 2021/0087406 A1, Mar. 25, 2021
Int. Cl. C09D 1/00 (2006.01); C09D 7/63 (2018.01); B05D 1/00 (2006.01); B05D 3/02 (2006.01); C01B 21/068 (2006.01); C01B 21/087 (2006.01); C01B 33/12 (2006.01); C23C 18/12 (2006.01)
CPC C09D 1/00 (2013.01) [B05D 1/005 (2013.01); B05D 3/0254 (2013.01); C01B 21/068 (2013.01); C01B 21/087 (2013.01); C01B 33/126 (2013.01); C09D 7/63 (2018.01); C23C 18/1204 (2013.01); C23C 18/1208 (2013.01); C23C 18/1279 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A Si-containing film forming composition comprising
a) a catalyst and/or a polysilane, and
b) a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3.