CPC C07C 211/64 (2013.01) [C07C 211/63 (2013.01); C09J 183/04 (2013.01); C11D 3/245 (2013.01); C11D 3/28 (2013.01); C11D 3/30 (2013.01); C11D 3/3445 (2013.01); C11D 3/43 (2013.01); C11D 11/0047 (2013.01); H01L 21/02082 (2013.01); C09J 2301/502 (2020.08)] | 5 Claims |
1. A composition for removing a polymer, the composition comprising: 0.1 to 20% by weight of a fluorinated alkyl compound; 60 to 99.89% by weight of a polar aprotic solvent wherein the polar aprotic solvent comprises at least one solvent selected from the group consisting of ketone-based, acetate-based, amide-based, pyridine-based, morpholine-based, pyrrolidone-based, urea-based, phosphate-based, sulfoxide-based, nitrile-based, carbonate-based, oxazolidone-based, and piperazine-based solvents; and 0.01 to 20% by weight of an amine compound, wherein the amine compound comprises an acyclic secondary amine compound or an acyclic tertiary amine compound; and
wherein the amine compound is a compound represented by one of Formulas 1 to 3:
In Formula 1, R1 and R2 each independently represent a linear or branched alkyl group having two to eight carbon atoms (C2 to C8), wherein R1 and R2 are linear or branched alkyl groups having four to eight carbon atoms (C4 to C8) when R1 and R2 are the same,
In Formula 2, R3 to R5 each independently represent a linear or branched alkyl group having one to eight carbon atoms (C1 to C8),
In Formula 3, n represents a positive integer among 3, 4, 5, and 6.
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