| CPC B41J 2/14016 (2013.01) [B41J 2/14145 (2013.01); B41J 2/1601 (2013.01); B41J 2/164 (2013.01); B41J 2/1606 (2013.01); B41J 2/1628 (2013.01); B41J 2/1631 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); B41J 2/1404 (2013.01); B41J 2/1603 (2013.01)] | 20 Claims |
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1. A liquid ejection head including a liquid ejection head substrate provided with an ejection element that generates energy for ejecting liquid, an ejection port formation member in which an ejection port through which to eject the liquid is formed, and a liquid chamber, which is formed between the liquid ejection head substrate and the ejection port formation member and houses liquid to be ejected through the ejection port, the liquid ejection head substrate comprising:
a substrate;
an insulating film stacked on the substrate to insulate the ejection element;
a communication port formed in the substrate and the insulating film in such a manner as to communicate with the liquid chamber; and
a liquid-resistant insulating film that has an adhesive property with respect to the ejection port formation member and is formed only of (i) a first, which covers a surface of the insulating film at a side where the ejection port formation member is provided and is partially in contact with the ejection port formation member; and ii) a second portion, which covers an inner surface of the communication port formed in the insulating film, the first portion and the second portion being provided in such a manner as to be continuous with each other.
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14. A liquid ejection head including a liquid ejection head substrate provided with an ejection element that generates energy for ejecting liquid, an ejection port formation member in which an ejection port through which to eject the liquid is formed, and a liquid chamber, which is formed between the liquid ejection head substrate and the ejection port formation member and houses liquid to be ejected through the ejection port, the liquid ejection head substrate comprising:
a substrate;
an insulating film stacked on the substrate to insulate the ejection element;
a communication port formed in the substrate and the insulating film in such a manner as to communicate with the liquid chamber; and
a coating film that is formed only of (i) a first portion, which covers a surface of the insulating film at a side where the ejection port formation member is provided and is partially in contact with the ejection port formation member, and (ii) a second portion, which covers an inner surface of the communication port formed in the insulating film, the first portion and the second portion being provided in such a manner as to be continuous with each other, the coating film being formed of a silicon compound containing carbon atoms.
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18. A method for manufacturing a liquid ejection head including a liquid ejection head substrate in which an ejection element that generates energy for ejecting liquid is formed, an ejection port formation member in which an ejection port through which to eject liquid is formed, and a liquid chamber, which is formed between the liquid ejection head substrate and the ejection port formation member and houses liquid to be ejected through the ejection port, the method comprising:
stacking, on a substrate, an insulating film that insulates the ejection element;
forming an opening portion in the insulating film at a side of the ejection element;
forming a liquid-resistant insulating film that has an adhesive property with respect to the ejection port formation member and continuously covers only a surface of the insulating film at a side where the ejection port formation member is provided and an inner surface of the opening portion; and
providing the ejection port formation member so that the ejection port formation member is in contact with a part of the liquid-resistant insulating film.
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