	US 12,069,914 B2
	Organic light emitting diode display device and manufacturing method thereof
Sung Hwan Kim, Yongin-si (KR); Won Kyu Kwak, Seongnam-si (KR); Sang Moo Choi, Yongin-si (KR); Ji-Hyun Ka, Seongnam-si (KR); Chul Kyu Kang, Suwon-si (KR); Dong Wook Kim, Asan-si (KR); and Won Se Lee, Seoul (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Nov. 22, 2021, as Appl. No. 17/532,253.
Application 17/532,253 is a division of application No. 16/433,182, filed on Jun. 6, 2019, granted, now 11,195,896.
Claims priority of application No. 10-2018-0065631 (KR), filed on Jun. 7, 2018.
Prior Publication US 2022/0085136 A1, Mar. 17, 2022
Int. Cl. H01L 27/12 (2006.01); H10K 59/121 (2023.01); H10K 59/131 (2023.01); H10K 71/00 (2023.01)

CPC H10K 59/131 (2023.02) [H01L 27/1222 (2013.01); H01L 27/124 (2013.01); H10K 59/121 (2023.02); H10K 71/00 (2023.02)]

20 Claims

1. A manufacturing method of an organic light emitting diode display, comprising:

forming a semiconductor layer on a substrate;

forming a doping mask on the semiconductor layer and doping the semiconductor layer;

removing the doping mask;

forming a first insulation layer covering the semiconductor layer;

forming a first conductor on the first insulation layer;

doping the semiconductor layer by using the first conductor as a mask;

forming a second insulation layer covering the first conductor;

forming a second conductor on the second insulation layer;

forming a third insulation layer covering the second conductor;

forming a third conductor on the third insulation layer;

forming a passivation layer covering the third conductor; and

forming a pixel electrode on the passivation layer.