US 12,069,809 B2
Laminated film structure and method for manufacturing laminated film structure
Kazuya Shimada, Aichi (JP); Masahito Hayamizu, Aichi (JP); Toshihiko Sakata, Nara (JP); and Makoto Chakuno, Osaka (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed by PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed on Jun. 2, 2023, as Appl. No. 18/205,318.
Application 18/205,318 is a division of application No. 17/914,961, granted, now 11,825,608, previously published as PCT/JP2020/048425, filed on Dec. 24, 2020.
Claims priority of application No. 2020-112687 (JP), filed on Jun. 30, 2020; and application No. 2020-207110 (JP), filed on Dec. 14, 2020.
Prior Publication US 2023/0389189 A1, Nov. 30, 2023
Int. Cl. C23C 28/00 (2006.01); H05K 3/02 (2006.01); H05K 3/42 (2006.01)
CPC H05K 3/022 (2013.01) [C23C 28/322 (2013.01); H05K 3/422 (2013.01); H05K 3/426 (2013.01); H05K 3/427 (2013.01); H05K 2203/0716 (2013.01); H05K 2203/072 (2013.01); H05K 2203/0723 (2013.01); Y10T 428/12611 (2015.01)] 9 Claims
OG exemplary drawing
 
1. A method for manufacturing a laminated film structure comprising:
forming an oxide layer on a to-be-treated surface of a to-be-treated object by bringing the to-be-treated surface into contact with a reaction solution containing fluorine and an oxide precursor, the to-be-treated object being made of an insulator or an insulator having a conductive layer formed on the surface thereof in advance;
removing fluorine in the oxide layer;
forming a catalyst layer by bringing the oxide layer into contact with a catalyst liquid; and
forming a metal film on the catalyst layer by an electroless plating method.