US 12,068,655 B2
Displacement device based on hall-effect sensors and planar motors
Chenyang Ding, Shanghai (CN); Hanxiong Li, Shanghai (CN); Guoqi Zhang, Shanghai (CN); Chunyuan Chen, Shanghai (CN); and Xiaohui Wu, Shanghai (CN)
Assigned to Shanghai Yinguan Semiconductor Technology Co., Ltd., Shanghai (CN)
Appl. No. 17/425,831
Filed by SHANGHAI YINGUAN SEMICONDUCTOR TECHNOLOGY CO., LTD, Shanghai (CN)
PCT Filed Nov. 29, 2019, PCT No. PCT/CN2019/121897
§ 371(c)(1), (2) Date Jul. 26, 2021,
PCT Pub. No. WO2020/155829, PCT Pub. Date Aug. 6, 2020.
Claims priority of application No. 201910088055.5 (CN), filed on Jan. 29, 2019.
Prior Publication US 2022/0052585 A1, Feb. 17, 2022
Int. Cl. H02K 41/00 (2006.01); H02K 11/215 (2016.01); H02K 41/02 (2006.01); H02K 41/03 (2006.01); H02K 41/035 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01)
CPC H02K 41/031 (2013.01) [H02K 11/215 (2016.01); H02K 41/00 (2013.01); H02K 41/02 (2013.01); H02K 41/0356 (2013.01); G03F 7/20 (2013.01); G03F 7/70758 (2013.01); H02K 2201/18 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A displacement device based on Hall-effect sensors and planar motors, characterized in that, the displacement device at least comprises: a planar motor stator, a planar motor mover, and a Hall-effect sensor array,
a magnet array on the planar motor stator extends on a first plane substantially parallel to a direction X and a direction Y to form a working area, a coil array on the planar motor mover is configured on a second plane parallel to the first plane, the planar motor mover is movably configured adjacent to the planar motor stator along a direction Z, and an interaction between the coil array and the magnet array causes the planar motor mover to produce a displacement of at least two degrees of freedom within the working area, wherein, the direction X is approximately perpendicular to the direction Y, the direction Z is approximately perpendicular to the first plane,
the magnet array is configured by first magnet blocks and second magnet blocks alternately in rows and columns, the first magnet blocks include a plurality of first magnets, each of the first magnets linearly extends along the direction X and is arranged in sequence in the direction Y, the second magnet blocks include a plurality of second magnets, each of the second magnets extends linearly along the direction Y and is arranged in sequence in the direction X,
the Hall-effect sensor array is configured within the working area, is composed of a plurality of Hall-effect sensors, and is installed on the planar motor mover, a size mx of the magnet blocks of the magnet array in the direction X is not less than twice a column spacing sx of the Hall-effect sensor array, and the size my of the magnet blocks of the magnet array in the direction Y is not less than twice a row spacing sy of the Hall-effect sensor array.