US 12,068,582 B2
Vertical-cavity surface-emitting laser
Ki Hwang Lee, Ansan-si (KR); Jeong Rae Ro, Ansan-si (KR); Byueng Su Yoo, Ansan-si (KR); Yoon Sang Jeon, Ansan-si (KR); and Gong Hee Choi, Ansan-si (KR)
Assigned to SEOUL VIOSYS CO., LTD., Ansan-si (KR)
Filed by SEOUL VIOSYS CO., LTD., Ansan-si (KR)
Filed on Jul. 24, 2023, as Appl. No. 18/225,648.
Application 18/225,648 is a continuation of application No. 17/878,032, filed on Jul. 31, 2022, granted, now 11,764,545.
Application 17/878,032 is a continuation of application No. 16/720,634, filed on Dec. 19, 2019, granted, now 11,404,848, issued on Aug. 2, 2022.
Claims priority of provisional application 62/784,616, filed on Dec. 24, 2018.
Prior Publication US 2023/0369826 A1, Nov. 16, 2023
Int. Cl. H01S 5/183 (2006.01); H01S 5/042 (2006.01); H01S 5/22 (2006.01); H01S 5/42 (2006.01)
CPC H01S 5/18311 (2013.01) [H01S 5/04254 (2019.08); H01S 5/18361 (2013.01); H01S 5/2202 (2013.01); H01S 5/2205 (2013.01); H01S 5/423 (2013.01); H01S 2301/176 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vertical-cavity surface-emitting laser (VCSEL), comprising:
a substrate;
a lower mirror;
an upper mirror;
an active layer interposed between the lower mirror and the upper mirror;
a connector disposed on the upper mirror;
a plurality of oxidation holes passing through the upper mirror and the active layer;
an upper insulation layer covering the plurality of oxidation holes; and
a pad electrically connected to the connector,
wherein:
at least a portion of the connector is disposed in the plurality of oxidation holes;
the connector includes a plurality of rings configured to emit light generated from the active layer outwardly;
the plurality of rings is disposed in substantially a honeycomb shape; and
the pad is disposed closer to one side of the substrate than an opposing side of the substrate.