CPC H01S 5/18311 (2013.01) [H01S 5/04254 (2019.08); H01S 5/18361 (2013.01); H01S 5/2202 (2013.01); H01S 5/2205 (2013.01); H01S 5/423 (2013.01); H01S 2301/176 (2013.01)] | 20 Claims |
1. A vertical-cavity surface-emitting laser (VCSEL), comprising:
a substrate;
a lower mirror;
an upper mirror;
an active layer interposed between the lower mirror and the upper mirror;
a connector disposed on the upper mirror;
a plurality of oxidation holes passing through the upper mirror and the active layer;
an upper insulation layer covering the plurality of oxidation holes; and
a pad electrically connected to the connector,
wherein:
at least a portion of the connector is disposed in the plurality of oxidation holes;
the connector includes a plurality of rings configured to emit light generated from the active layer outwardly;
the plurality of rings is disposed in substantially a honeycomb shape; and
the pad is disposed closer to one side of the substrate than an opposing side of the substrate.
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