US 12,068,362 B2
Electrode structure having improved shape, and electronic device including the electrode structure
Fabrizio Cerini, Magenta (IT); Silvia Adorno, Novate Milanese (IT); Dario Paci, Vittuone (IT); and Marco Salina, Cremosano (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed on Oct. 5, 2021, as Appl. No. 17/494,475.
Claims priority of application No. 102020000024346 (IT), filed on Oct. 15, 2020.
Prior Publication US 2022/0123105 A1, Apr. 21, 2022
Int. Cl. H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 23/538 (2006.01); H01L 49/02 (2006.01)
CPC H01L 28/86 (2013.01) [H01L 23/5223 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electrode structure, comprising:
a first pad of conductive material, including:
a first central body having a perimeter; and
a first annular element having an inner surface opposite an outer surface, the perimeter of the first central body facing the inner surface of the first annular element, the inner surface being spaced from the outer surface in a first direction for a first dimension;
a first through opening between the first central body and the first annular element; and
a conductive strip having a first end physically and electrically coupled to the first pad, and
wherein the first end of the conductive strip is physically and electrically coupled to the first annular element through a first transition region, a second dimension in the first direction is from the inner surface of the first annular element to the perimeter of the first central body, the first dimension being greater than the second dimension.
 
9. An electronic device, comprising:
an electrode structure, the electrode structure including:
a first pad of conductive material including a first central body spaced from an inner surface of a first annular element in a first direction, a first dimension is between the first central body and the first annular element, the first annular element having a second dimension in the first direction between the inner surface and an opposite outer surface, the first dimension is less than the second dimension;
a first through opening; and
a conductive strip having a first end physically and electrically coupled to the first pad, the first annular element being around the first through opening, and
wherein the first end of the conductive strip is physically and electrically coupled to the first annular element through a first transition region;
a substrate having a front side;
a dielectric region on the front side of the substrate;
a first metallization including the first pad, extending in the dielectric region;
a first plate of a first capacitor that includes the first metallization; and
a second metallization including a second plate of the first capacitor, extending over the dielectric region, the dielectric region extending in a second direction transverse the first direction between the first metallization and the second metallization.
 
15. An electrode, comprising:
a first conductive pad including a first annular element around a first through opening, the first conductive pad having a first central body spaced from the first annular element for a first dimension via the first through opening, a second dimension is between an outer surface of the first annular element and an inner surface of the first annular element, the first dimension is less than the second dimension, a diameter of the first central body being a third dimension that is greater than the second dimension; and
a conductive strip having a first end coupled to the first annular element through a first transition region.