US 12,068,299 B2
Semiconductor device and method of manufacturing the same
Tomoya Sanuki, Yokkaichi Mie (JP)
Assigned to KIOXIA CORPORATION, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Jan. 20, 2022, as Appl. No. 17/580,370.
Application 17/580,370 is a continuation of application No. 16/549,486, filed on Aug. 23, 2019, granted, now 11,257,802.
Claims priority of application No. 2019-037626 (JP), filed on Mar. 1, 2019.
Prior Publication US 2022/0149028 A1, May 12, 2022
Int. Cl. H01L 25/18 (2023.01); H01L 23/00 (2006.01); H01L 23/48 (2006.01); H01L 23/528 (2006.01); H01L 25/00 (2006.01)
CPC H01L 25/18 (2013.01) [H01L 23/481 (2013.01); H01L 23/528 (2013.01); H01L 24/05 (2013.01); H01L 24/08 (2013.01); H01L 24/09 (2013.01); H01L 25/50 (2013.01); H01L 2224/0557 (2013.01); H01L 2224/08145 (2013.01); H01L 2224/09181 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/14511 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a first chip including a first substrate and a logic circuit provided on an upper surface of the first substrate; a second chip provided above the first chip and bonded to the first chip, the second chip including a first wiring layer, a memory cell array provided above the first wiring layer, a second substrate provided above the memory cell array, and a first plug provided between the second substrate and the first wiring layer and extending in a first direction;
a plurality of metal pads provided on a bonding surface of the first chip and the second chip and electrically coupling the logic circuit to the memory cell array;
a bonding pad provided above the second substrate; and
a second plug extending through the second substrate in the first direction and coupling the bonding pad to the first plug, wherein
an upper end of the first plug has a first width in a second direction crossing the first direction,
the first width is smaller than a maximum width of the first plug in the second direction,
an upper end of the second plug has a second width in the second direction, and
the first width is smaller the second width.