CPC H01L 23/5222 (2013.01) [H01L 21/823493 (2013.01)] | 20 Claims |
1. An apparatus, comprising;
a substrate;
an isolator that is formed over the substrate, the isolator including a silicon shield layer that is formed between a first buried oxide (BOX) layer and a second BOX layer;
a silicon layer having an oxide trench structure formed therein, the oxide trench structure being arranged to define a first silicon island and a second silicon island;
a first electronic circuit that is formed over the first silicon island; and
a second electronic circuit that is formed over the second silicon island, the second electronic circuit being electrically coupled to the first electronic circuit.
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