US 12,068,186 B2
Load port module
Radik Sunugatov, Santa Clara, CA (US); Robert Carlson, Milpitas, CA (US); and Mike Krolak, Los Gatos, CA (US)
Assigned to Brooks Automotion US, LLC, Chelmsford, MA (US)
Filed by Brooks Automation US, LLC, Chelmsford, MA (US)
Filed on Oct. 18, 2022, as Appl. No. 18/047,543.
Application 18/047,543 is a continuation of application No. 17/176,949, filed on Feb. 16, 2021, granted, now 11,476,142.
Application 17/176,949 is a continuation of application No. 16/692,359, filed on Nov. 22, 2019, granted, now 10,923,375, issued on Feb. 16, 2021.
Claims priority of provisional application 62/772,376, filed on Nov. 28, 2018.
Prior Publication US 2023/0245909 A1, Aug. 3, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); B65G 1/137 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67742 (2013.01) [B65G 1/137 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate loading device comprising:
a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and processing apparatus;
a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the cassette support being configured so that an internal atmosphere of the at least one substrate cassette container is accessed from the cassette support at predetermined access locations of the at least one substrate cassette container; and
the cassette support has impinging thereon a predetermined continuous steady state differential pressure plenum region that defines a continuously steady state fluidic isolation barrier disposed on the cassette support between the predetermined access locations of the at least one substrate cassette container and another predetermined section of the cassette support isolating the other predetermined section from the predetermined access locations.