CPC H01L 21/67712 (2013.01) [B65G 1/06 (2013.01); H01L 21/67736 (2013.01); B65G 2201/0297 (2013.01)] | 20 Claims |
1. An article transfer system, comprising:
a plurality of stage modules respectively provided at a plurality of layers;
an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules; and
a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules,
wherein the interlayer transfer apparatus comprises:
a mast frame extending so as to intersect each stage module of the plurality of stage modules; and
a plurality of carriage units configured to:
move along a length direction of the mast frame,
transfer articles, and
move in a parallel manner with each other.
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