US 12,068,183 B2
Substrate container with door gasket
Aaron Vestal, Colorado Springs, CO (US); Matthew A. Fuller, Colorado Springs, CO (US); and Christopher Strickhouser, Monument, CO (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Jun. 13, 2022, as Appl. No. 17/839,208.
Claims priority of provisional application 63/210,342, filed on Jun. 14, 2021.
Prior Publication US 2022/0406637 A1, Dec. 22, 2022
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67376 (2013.01) 18 Claims
OG exemplary drawing
 
1. A door for a wafer container, comprising:
a door plate including a gland configured to receive a portion of a gasket; and
a gasket including a compressible material, the gasket including:
a seal body; and
a retention projection, the retention projection comprising:
a retention segment extending from the seal body, the retention segment having a cross-sectional width equal to or less than a cross-sectional width of the gland at a corresponding depth in the gland;
a compression relief segment extending from the retention segment, the compression relief segment having a cross-sectional width less than a cross-sectional width of the retention segment; and
a bead disposed at an end of the compression relief segment, the bead having a maximum cross-sectional width greater than a cross-sectional width of the gland at a corresponding depth in the gland.