US 12,068,142 B2
Carrier with vertical grid for supporting substrates in coater
Bo Neilan, Byhalia, MS (US); Michael Potter, Huntington Beach, CA (US); and Dhairya Shrivastava, Los Altos, CA (US)
Assigned to View, Inc., San Jose, CA (US)
Filed by View, Inc., Milpitas, CA (US)
Filed on May 10, 2023, as Appl. No. 18/195,887.
Application 18/195,887 is a division of application No. 17/864,110, filed on Jul. 13, 2022, granted, now 11,688,589.
Application 17/864,110 is a division of application No. 15/733,514, granted, now 11,424,109, issued on Aug. 23, 2022, previously published as PCT/US2019/021227, filed on Mar. 7, 2019.
Application 17/864,110 is a division of application No. 14/893,502, granted, now 11,133,158, issued on Sep. 28, 2021, previously published as PCT/US2014/041569, filed on Jun. 9, 2014.
Claims priority of provisional application 62/681,008, filed on Jun. 5, 2018.
Claims priority of provisional application 62/642,525, filed on Mar. 13, 2018.
Claims priority of provisional application 61/833,366, filed on Jun. 10, 2013.
Prior Publication US 2023/0282458 A1, Sep. 7, 2023
Int. Cl. H01J 37/32 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/56 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC H01J 37/32715 (2013.01) [C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 14/562 (2013.01); C23C 14/568 (2013.01); H01J 37/32651 (2013.01); H01J 37/32779 (2013.01); H01L 21/6734 (2013.01); H01L 21/67712 (2013.01); H01L 21/6776 (2013.01); H01J 2237/026 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/332 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A carrier for holding at least one substrate in a substantially vertical orientation while passing through a coater that provides a coating on at least a front face of the at least one substrate, the at least one substrate having a back face disposed opposite the front face, the carrier comprising:
a lower vertical grid mount;
an upper vertical grid mount;
a plurality of vertical support bars, at least one vertical support bar being positioned behind the back face of the at least one substrate and being engaged, by respective moveable attachments, with both the upper vertical grid mount and the lower vertical grid mount; wherein
the respective moveable attachments permit horizontal movement of the at least one vertical support bar along the lower vertical grid mount and the upper vertical grid mount.