US 12,068,132 B2
Radio-frequency power supply apparatus
Yuichi Hasegawa, Osaka (JP); and Tatsuya Morii, Osaka (JP)
Assigned to DAIHEN CORPORATION, Osaka (JP)
Filed by DAIHEN Corporation, Osaka (JP)
Filed on Sep. 1, 2022, as Appl. No. 17/901,477.
Claims priority of application No. 2021-161164 (JP), filed on Sep. 30, 2021.
Prior Publication US 2023/0094385 A1, Mar. 30, 2023
Int. Cl. H01J 37/00 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32128 (2013.01); H01J 37/32165 (2013.01); H01J 37/32174 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A radio-frequency (RF) power supply apparatus comprising:
a first power supply configured to supply first RF power to a load by outputting first RF voltage with a first fundamental frequency;
a second power supply configured to supply second RF power to the load by outputting second RF voltage with a second fundamental frequency lower than the first fundamental frequency; and
a matching device connected individually to the first power supply and to the second power supply and configured to
generate a clock signal with a frequency higher than the first fundamental frequency on the basis of detected information on the second RF power, and
provide the clock signal to the first power supply,
wherein the first power supply is configured to
generate, by using the clock signal, a waveform signal with the same cycle as a cycle of the second RF voltage output from the second power supply, and
perform, by using the clock signal, frequency modulation control on the first RF voltage to be output from the first power supply.