US 12,068,131 B2
Multi-level parameter and frequency pulsing with a low angular spread
Juline Shoeb, Fremont, CA (US); Alex Paterson, San Jose, CA (US); and Ying Wu, Livermore, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Sep. 9, 2022, as Appl. No. 17/942,040.
Application 17/942,040 is a continuation of application No. 16/783,721, filed on Feb. 6, 2020, granted, now 11,462,390.
Application 16/783,721 is a continuation of application No. 16/275,008, filed on Feb. 13, 2019, granted, now 10,573,494, issued on Feb. 25, 2020.
Application 16/275,008 is a continuation of application No. 15/928,039, filed on Mar. 21, 2018, granted, now 10,224,183, issued on Mar. 5, 2019.
Prior Publication US 2023/0005718 A1, Jan. 5, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H05H 1/46 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32146 (2013.01) [H01J 37/32183 (2013.01); H01J 2237/327 (2013.01); H01J 2237/334 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A method comprising:
controlling a first radio frequency (RF) generator to generate a first RF signal;
controlling a parameter of the first RF signal to pulse among a plurality of parameter levels in a repeated manner, wherein the plurality of parameter levels include a first parameter level, a second parameter level, and a third parameter level; and
controlling a frequency of the first RF signal to pulse from a first frequency level to a second frequency level in a repeated manner, wherein the second frequency level is greater than the first frequency level by a preset range, wherein the frequency of the first RF signal is controlled to pulse from the first frequency level to the second frequency level to achieve the preset range while said controlling the parameter of the first RF signal to pulse from the first parameter level to the second parameter level, wherein the frequency of the first RF signal is controlled to be maintained at the second frequency level while said controlling the parameter of the first RF signal to pulse from the second parameter level to the third parameter level.