CPC H01J 37/32146 (2013.01) [H01J 37/32183 (2013.01); H01J 2237/327 (2013.01); H01J 2237/334 (2013.01)] | 25 Claims |
1. A method comprising:
controlling a first radio frequency (RF) generator to generate a first RF signal;
controlling a parameter of the first RF signal to pulse among a plurality of parameter levels in a repeated manner, wherein the plurality of parameter levels include a first parameter level, a second parameter level, and a third parameter level; and
controlling a frequency of the first RF signal to pulse from a first frequency level to a second frequency level in a repeated manner, wherein the second frequency level is greater than the first frequency level by a preset range, wherein the frequency of the first RF signal is controlled to pulse from the first frequency level to the second frequency level to achieve the preset range while said controlling the parameter of the first RF signal to pulse from the first parameter level to the second parameter level, wherein the frequency of the first RF signal is controlled to be maintained at the second frequency level while said controlling the parameter of the first RF signal to pulse from the second parameter level to the third parameter level.
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