US 12,067,704 B2
Defect characterization method and apparatus
Ning Huang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Oct. 21, 2021, as Appl. No. 17/451,819.
Application 17/451,819 is a continuation of application No. PCT/CN2021/108276, filed on Jul. 23, 2021.
Claims priority of application No. 202110290131.8 (CN), filed on Mar. 18, 2021.
Prior Publication US 2022/0301147 A1, Sep. 22, 2022
Int. Cl. G06T 7/00 (2017.01); G01N 21/95 (2006.01); G01N 23/2251 (2018.01)
CPC G06T 7/0004 (2013.01) [G01N 21/9501 (2013.01); G01N 23/2251 (2013.01); G01N 2201/06113 (2013.01); G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/507 (2013.01); G01N 2223/6116 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A defect characterization method, comprising:
obtaining a first scanning image and target defect coordinates in the first scanning image;
obtaining a first defect image according to the target defect coordinates in the first scanning image, the first defect image containing a defect area where a target defect is located and a noise area not containing the target defect;
marking the noise area, performing Automatic Defect Review (ADR) calculation on the defect area, and obtaining a pixel level value of a defect in the defect area;
obtaining coordinates of the defect with a maximum pixel level value, and obtaining a second defect image according to the coordinates of the defect with the maximum pixel level value; and
classifying the defect with the maximum pixel level value according to the second defect image.