CPC G06F 30/398 (2020.01) [G03F 7/705 (2013.01); G03F 7/70525 (2013.01); G03F 7/7065 (2013.01); G06F 30/20 (2020.01); G06N 7/01 (2023.01); H01L 22/20 (2013.01)] | 23 Claims |
1. A non-transitory computer readable medium having instructions therein, the instructions, when executed by a computer system, configured to cause the computer system to at least:
obtain an actual value of a parameter associated with a pattern processed by a semiconductor device manufacturing process onto a substrate; and
determine or predict, by a computer hardware system processing a machine learning model that takes the actual value, or information derived therefrom, as an input, an existence, a probability of existence, a characteristic, or a combination selected therefrom, of a defect produced from the pattern using the device manufacturing process.
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