US 12,066,815 B2
Recipe creation method or apparatus utilizing a series of steps according to a target recipe file for semiconductor manufacturing or substrating processing
Takatoshi Seki, Toyama (JP)
Assigned to Kokusai Electric Corporation, Tokyo (JP)
Filed by Kokusai Electric Corporation, Tokyo (JP)
Filed on Sep. 16, 2021, as Appl. No. 17/477,249.
Application 17/477,249 is a continuation of application No. PCT/JP2019/011897, filed on Mar. 20, 2019.
Prior Publication US 2022/0004172 A1, Jan. 6, 2022
Int. Cl. G05B 99/00 (2006.01); G05B 19/418 (2006.01); H01L 21/67 (2006.01)
CPC G05B 19/41865 (2013.01) [H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/67276 (2013.01); G05B 2219/32095 (2013.01); G05B 2219/32097 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67155 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A recipe creation method, comprising:
displaying, on a display of a substrate processing apparatus, a recipe editing screen including:
a step editing area that displays a series of steps that are performed in substrate processing according to a target recipe file to be subjected to recipe creation,
a selection screen area that displays a parameter list for selection of parameters included in the target recipe file, and
a parameter editing screen area that edits the parameters;
receiving a selection operation that selects an editing target parameter from the parameter list displayed on the selection screen area;
displaying, on the parameter editing screen area, in an editable manner, a timing chart that is changeable at a time of each step in the series of steps; and
editing the editing target parameter by receiving an operation instruction to edit the timing chart displayed on the parameter editing screen area and changing the timing chart according to the operation instruction.