US 12,066,759 B2
Light source apparatus, exposure apparatus, and article manufacturing method
Hiroyuki Tomita, Tochigi (JP); and Hiroshi Fukazawa, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 23, 2021, as Appl. No. 17/482,812.
Claims priority of application No. 2020-167964 (JP), filed on Oct. 2, 2020.
Prior Publication US 2022/0107485 A1, Apr. 7, 2022
Int. Cl. G03F 7/00 (2006.01); F21V 29/60 (2015.01); G02B 19/00 (2006.01)
CPC G03F 7/70016 (2013.01) [F21V 29/60 (2015.01); G02B 19/0019 (2013.01); G02B 19/0047 (2013.01); G03F 7/70858 (2013.01); G03F 7/70891 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A light source apparatus comprising a holder configured to hold a lamp including a metal base having a cylindrical surface, a condensing mirror configured to condense light generated by the lamp, a first nozzle including a first ejection hole configured to eject a gas to cool the metal base, and a second nozzle including a second ejection hole configured to eject the gas to cool the metal base,
wherein a distance between a first straight line including a center axis of the first ejection hole and a center axis of the metal base ranges from not less than ½ of a radius of the cylindrical surface to not more than the radius,
wherein a distance between a second straight line including a center axis of the second ejection hole and the center axis of the metal base ranges from not less than ½ of the radius of the cylindrical surface to not more than the radius, and
wherein the center axis of the metal base is arranged between the first straight line including the center axis of the first ejection hole and the second straight line including the center axis of the second ejection hole.