CPC G03F 1/26 (2013.01) [G03F 1/22 (2013.01); G03F 1/24 (2013.01); G03F 1/52 (2013.01); G03F 1/54 (2013.01); G03F 1/80 (2013.01); H01L 21/0337 (2013.01)] | 20 Claims |
1. A mask, comprising:
a reflective layer;
an absorption layer over the reflective multilayer;
an absorption part, disposed in the reflective layer and the absorption layer, wherein an entire top surface of the absorption part is substantially flush with a top surface of the absorption layer; and
a buffer layer, disposed between the reflective layer and the absorption layer, wherein the absorption part is further disposed in the buffer layer.
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