US 12,066,662 B2
Apparatus for optical coupling and system for communication
Feng-Wei Kuo, Hsinchu County (TW); Wen-Shiang Liao, Miaoli County (TW); Robert Bogdan Staszewski, Dublin (IE); and Jianglin Du, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jun. 14, 2023, as Appl. No. 18/334,386.
Application 18/334,386 is a continuation of application No. 17/069,879, filed on Oct. 14, 2020, granted, now 11,719,885.
Prior Publication US 2023/0324615 A1, Oct. 12, 2023
Int. Cl. G02B 6/293 (2006.01); F21V 8/00 (2006.01); G02B 6/30 (2006.01)
CPC G02B 6/29325 (2013.01) [G02B 6/0083 (2013.01); G02B 6/305 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A grating coupler, comprising:
a substrate; and
a plurality of coupling gratings arranged over the substrate along a first direction and having a plurality of lengths, respectively, in the first direction,
wherein each of the plurality of coupling gratings comprises a first portion having a first width in the first direction and a first thickness in a second direction that is perpendicular to the first direction and that is perpendicular to an upper surface of the substrate, a second portion having a second width in the first direction and a second thickness in the second direction, and a third portion having a third width in the first direction and a third thickness in the second direction, the third thickness is greater than the second thickness, and the second thickness is greater than the first thickness, and each of the first widths, the second widths, and the third widths increase in the first direction for each of the plurality of coupling gratings and such that the plurality of lengths, respectively, increase in the first direction.