US 12,066,620 B2
MEMS mirror for OCT probe and method of manufacturing such MEMS mirror
Hendrikus Wilhelmus Leonardus Antonius Maria Van Lierop, Weert (NL); Maaike De Jong, Eindhoven (NL); and Geert Claassen, Velp (NL)
Assigned to Scinvivo B.V., Eindhoven (NL)
Appl. No. 16/979,083
Filed by Scinvivo B.V., Eindhoven (NL)
PCT Filed Mar. 8, 2019, PCT No. PCT/NL2019/050154
§ 371(c)(1), (2) Date Sep. 8, 2020,
PCT Pub. No. WO2019/172767, PCT Pub. Date Sep. 12, 2019.
Claims priority of application No. 2020564 (NL), filed on Mar. 9, 2018.
Prior Publication US 2021/0055543 A1, Feb. 25, 2021
Int. Cl. G02B 26/08 (2006.01); A61B 5/00 (2006.01); G01B 9/02 (2022.01); G01B 9/02091 (2022.01)
CPC G02B 26/0841 (2013.01) [A61B 5/0066 (2013.01); G01B 9/0205 (2013.01); G01B 9/02091 (2013.01); A61B 2562/0242 (2013.01); A61B 2562/028 (2013.01); A61B 2562/12 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A MEMS mirror having:
a stator,
a rotor, having a rotor support and a rotor body, said rotor support having a first end facing the stator and an opposite, second end that is fixed to a first face of the rotor body, said rotor body having a mirror surface at a second face oppostie the first face,
wherein said rotor support spaces the rotor body from the stator over a range of rotation of the rotor with respect to the stator, and
a pair of comb elements that are manually interdigitated in a neutral state of the rotor, said pair of comb elements including:
a first comb element fixed to the stator and defining a reference plane, having a surface that divides a first side of the reference plane from an opposite, second side of the reference plane, and
a second comb element fixed to the first end of the rotor support,
wherein the rotor support is coupled at mutually opposite sides of the first end via respective torsion beams to the stator, wherein the respective torsion beams extend along a rotation axis in the reference plane to allow the rotor to rotate over said range of rotation along the rotation axis, and
the stator and the rotor support are at, respectively, said first and second sides of the reference plane.