CPC G01N 33/0052 (2013.01) [G01N 21/01 (2013.01); G01N 21/255 (2013.01); G01N 21/314 (2013.01); G01N 21/33 (2013.01); G01N 2021/0112 (2013.01)] | 8 Claims |
1. A method for measuring a concentration of fluorine gas, the method comprising:
irradiating a halogen fluoride-containing gas with ultraviolet light in which a ratio (WX/WF) of a maximum value (WX) of ultraviolet light intensity in a wavelength region of less than 250 nm with respect to an ultraviolet light intensity (WF) at a wavelength of 285 nm is 1/10 or less; and
measuring an absorbance at a wavelength of 285 nm to obtain a concentration of fluorine gas contained in the halogen fluoride-containing gas.
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