US 12,066,401 B2
Hydrogen gas sensor utilizing electrically isolated tunneling magnetoresistive stress sensing elements
James Geza Deak, Zhangjiagang (CN); and Zhimin Zhou, Zhangjiagang (CN)
Assigned to MultiDimension Technology Co., Ltd., Zhangjiagang (CN)
Appl. No. 17/755,180
Filed by MultiDimension Technology Co., Ltd., Zhangjiagang (CN)
PCT Filed Oct. 27, 2020, PCT No. PCT/CN2020/123946
§ 371(c)(1), (2) Date Apr. 22, 2022,
PCT Pub. No. WO2021/083137, PCT Pub. Date May 6, 2021.
Claims priority of application No. 201911048138.8 (CN), filed on Oct. 30, 2019.
Prior Publication US 2022/0373513 A1, Nov. 24, 2022
Int. Cl. G01N 27/72 (2006.01); G01N 33/00 (2006.01)
CPC G01N 27/72 (2013.01) [G01N 33/005 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A hydrogen gas sensor utilizing electrically isolated tunneling magnetoresistive stress sensing elements, comprising:
a deformable substrate;
a magnetoresistive bridge stress sensor located on the deformable substrate, an electrical isolation layer covering the magnetoresistive bridge stress sensor, and a magnetic shielding layer located on the electrical isolation layer; and
a hydrogen sensing layer located above the deformable substrate, where in the hydrogen sensing layer is located in a plane perpendicular to the deformation of the substrate covering the electrical isolation layer, the hydrogen sensing layer is configured to absorb or desorb hydrogen gas to generate expansion or contraction deformation and thus cause a stress change of the deformable substrate, and the magnetoresistive bridge stress sensor is configured to measure a hydrogen gas concentration utilizing the stress change of the deformable substrate.