CPC G01J 5/20 (2013.01) [G01J 5/0215 (2013.01)] | 17 Claims |
1. A sensor configured to sense heat or infrared light, the sensor comprising
a substrate including a recess portion having a bottom portion and opposite side portions connected to opposite ends of the bottom portion, the recess portion having outer surfaces at least partially defining a recess into the substrate, the substrate including one or more inner surfaces at least partially defining a cavity inside the substrate along the bottom portion and the opposite side portions of the recess portion;
a lower reflective layer on at least one of an upper surface of the bottom portion of the substrate, a lower surface of the bottom portion of the recess portion of the substrate, or a surface opposite to the lower surface of the bottom portion of the recess portion of the substrate;
a first electrode and a second electrode inside opposing inner side surfaces of the recess portion and facing each other;
a pixel structure configured to sense heat or infrared light inside the recess portion and embedded in the substrate; and
a planarization layer covering an entire upper portion of the substrate.
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