US 12,066,326 B2
Spectrometer
Takafumi Yokino, Hamamatsu (JP); Toshiteru Suzuki, Hamamatsu (JP); Katsuhiko Kato, Hamamatsu (JP); Issei Oshima, Hamamatsu (JP); and Takashi Oba, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/426,133
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jan. 28, 2020, PCT No. PCT/JP2020/003016
§ 371(c)(1), (2) Date Jul. 28, 2021,
PCT Pub. No. WO2020/158745, PCT Pub. Date Aug. 6, 2020.
Claims priority of application No. 2019-014161 (JP), filed on Jan. 30, 2019.
Prior Publication US 2022/0099487 A1, Mar. 31, 2022
Int. Cl. G01J 3/02 (2006.01)
CPC G01J 3/0256 (2013.01) [G01J 3/021 (2013.01); G01J 3/0262 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A spectrometer comprising:
a spectroscopic space defined by a support having a bottom wall part and a side wall part surrounding the spectroscopic space on one side of the bottom wall part, and a light detection element supported by the side wall part to face a surface of the bottom wall part on the one side, the spectroscopic space providing an optical path between the bottom wall part and the light detection element;
a cover arranged on an opening part formed by the side wall part and provided with a light transmitting part;
a joining member arranged between the cover and the opening part;
the light detection element being supported by the side wall part between the spectroscopic space and the cover; and
an optical function part provided on the surface of the bottom wall part on the one side,
wherein a vent is provided in at least one of the support, the cover, and the joining member,
the vent is open to an outside and a space defined by the support, the cover, and the light detection element and ventilates gas between the space and the outside, and
the space defined by the support, the cover, and the light detection element communicates with the spectroscopic space.