US 12,066,324 B2
Radiation sensor with an integrated mechanical optical modulator and related manufacturing process
Michele Vaiana, San Giovanni la Punta (IT); Enri Duqi, Milan (IT); and Maria Eloisa Castagna, Catania (IT)
Assigned to STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed on Nov. 19, 2021, as Appl. No. 17/530,785.
Claims priority of application No. 102020000027912 (IT), filed on Nov. 20, 2020.
Prior Publication US 2022/0163383 A1, May 26, 2022
Int. Cl. G01J 1/36 (2006.01); H01L 33/46 (2010.01)
CPC G01J 1/36 (2013.01) [H01L 33/465 (2013.01); G01J 2001/363 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A radiation sensor comprising:
a first body;
a second body;
a main cavity between the first body and the second body;
a detection cavity between the main cavity and the second body;
a detection assembly and a chopper assembly between the first body and the second body, the detection assembly and the chopper assembly mechanically coupled to delimit the main cavity, wherein the chopper assembly includes:
a suspended movable structure in the main cavity; and
an actuation structure including a first component embedded in the suspended movable structure and configured to be electrically controlled to cause a change of position of the suspended movable structure,
wherein the detection assembly includes:
a member extending across the detection cavity between the detection cavity and the main cavity and facing the main cavity; and
a plurality of detection devices embedded in the member, and
wherein the suspended movable structure comprises a first shield of conductive material, the first shield being configured to shield the plurality of detection devices from radiation, the shielding of the plurality of detection devices being a function of a position of the suspended movable structure.