US 12,066,321 B2
Method for determining the path of a measurement beam of an interferometric measuring device, and measuring device for interferometric measurement of an object under measurement
Bernd Armbruster, Karlsruhe (DE); Matthias Schussler, Waldbronn (DE); and Bernd Heinen, Karlsruhe (DE)
Assigned to Polytec GmbH, Waldbronn (DE)
Appl. No. 17/251,875
Filed by Polytec GmbH, Waldbronn (DE)
PCT Filed Jun. 5, 2019, PCT No. PCT/EP2019/064708
§ 371(c)(1), (2) Date Dec. 14, 2020,
PCT Pub. No. WO2019/238505, PCT Pub. Date Dec. 19, 2019.
Claims priority of application No. 10 2018 114 478.4 (DE), filed on Jun. 15, 2018.
Prior Publication US 2021/0255030 A1, Aug. 19, 2021
Int. Cl. G01H 9/00 (2006.01); G01B 11/25 (2006.01); G01S 17/58 (2006.01); G01S 17/894 (2020.01)
CPC G01H 9/00 (2013.01) [G01B 11/25 (2013.01); G01S 17/58 (2013.01); G01S 17/894 (2020.01)] 14 Claims
OG exemplary drawing
 
1. A method for determining a beam path of a measurement beam of an interferometric measurement apparatus, the method comprising:
A recording a plurality of spatially resolved measurement object images of at least one measurement surface of a measurement object from different perspectives;
B creating a three-dimensional measurement object model which comprises at least the measurement surface of the measurement object using the plurality of spatially resolved images of the measurement surface;
C providing a relative beam position image recording unit and recording at least one spatially resolved relative beam position determination image of at least the measurement surface of the measurement object using the relative beam position image recording unit;
D determining a spatial position and orientation of the relative beam position image recording unit relative to the measurement object using the at least one spatially resolved relative beam position determination image in combination with at least one of the three-dimensional measurement object model or the plurality of spatially resolved measurement object images by comparing the at least one relative beam position determination image with views from different perspectives calculated using the three-dimensional measurement object model and assigning coordinates to the relative beam position image recording unit in the coordinate system of the measurement object model;
E providing a spatial relation between the spatial beam path of the measurement beam of the interferometric measurement apparatus and the position and orientation of the relative beam position image recording unit;
F determining the spatial beam path of the measurement beam of the interferometric measurement apparatus relative to the measurement object based on the spatial relation provided in method step E and the spatial position and orientation of the relative beam position image recording unit relative to the measurement object;
wherein the measurement apparatus has a beam directing unit for directing the measurement beam at a plurality of spatially different measurement points.